Ex Parte ZhangDownload PDFPatent Trial and Appeal BoardJun 19, 201411652735 (P.T.A.B. Jun. 19, 2014) Copy Citation UNITED STATES PATENT AND TRADEMARK OFFICE ____________________ BEFORE THE PATENT TRIAL AND APPEAL BOARD ____________________ Ex parte TONGLONG ZHANG ____________________ Appeal 2012-004124 Application 11/652,735 Technology Center 2800 ____________________ Before ADRIENE LEPIANE HANLON, CATHERINE Q. TIMM, and JAMES C. HOUSEL, Administrative Patent Judges. TIMM, Administrative Patent Judge. DECISION ON APPEAL STATEMENT OF THE CASE Appellant seeks review of the Examiner’s decision to reject claims 1-12 and 21-28. We have jurisdiction under 35 U.S.C. §§ 6(b) and 134(a). We REVERSE and ENTER A NEW GROUND OF REJECTION. The claims are directed to a method for fabricating a via in a substrate. Claim 1 is illustrative: Claim 1: A method for fabricating a via in a substrate, said method comprising: Appeal 2012-004124 Application 11/652,735 2 forming a blanket metal layer on a surface of said substrate; drilling a via hole through said blanket metal layer and said substrate; performing a differential plating of said blanket metal layer and an inner wall of said via hole so as to preferentially cover said inner wall relative to said blanket metal layer; patterning said surface of said substrate, said via hole remaining exposed during said patterning. (App. Br. 20, Claims App’x.) OPINION The Examiner rejects all of the pending claims as obvious under 35 U.S.C. § 103(a) over various combinations of prior art references with Hirose.1 The dispute on appeal involves the question of whether Hirose teaches the claimed step of patterning the surface of the substrate with “said via hole remaining exposed during said patterning” (claims 1 and 21). (Compare Appeal Br. 7-17 with Ans. 6 and 16-18.) In order for us to resolve the dispute, we must first determine what is meant by “said via hole remaining exposed” as that phrase is used in claims 1 and 21, the independent claims on appeal. Appellant’s Specification does not use the phrase “via hole remaining exposed” and, in fact, the Specification describes a method of covering the surfaces of the via hole with layers of material, specifically, a seed layer and blanket metal layer. Throughout the Specification, the “via hole” is defined as the hole drilled through the substrate or circuit board of a given diameter 1 US 2003/0102151 A1, published June 5, 2003 Appeal 2012-004124 Application 11/652,735 3 and bounded by the inner walls of the hole before any subsequent layers are deposited onto the inner walls (Spec. 2:17-21; 6:1-8; 9:6-11 (hole having diameter 180 as shown in Fig. 1A and 1B); 11:8 to 14:2 (hole 402 having diameter 480 and inner wall 414 as shown in Fig. 4B, hole 502 having inner wall 514 as shown in Fig. 5, hole 602 having inner wall 614 as shown in Fig. 6, and hole 702 having diameter 780 and inner wall 716 as shown in Figs. 7A and 7B).) The Specification discloses that inner walls of the via hole are covered with a seed layer (534 in Fig. 5) (Spec. 11:19 to 12:4) and then further plated with a blanket metal layer (636 in Fig. 6 over seed layer 634) (Spec. 12:5-19). In the physical sense, “exposed” is generally understood to mean “to uncover or bare to the air, cold, etc.” Expose, http://dictionary.reference.com/browse/exposed?s=t&path=/. But it is not clear what “remaining exposed” means in the context of Appellant’s claims given that the inner walls of the via holes described in Appellant’s Specification are not exposed, but covered with seed and blanket layers. Nor do the top and bottom openings of the hole “remain exposed” as the seed and blanket layers extend into the hole (see., e.g., Fig. 6). Appellant’s Specification describes a step of patterning the substrate surface (622a in Figure 6) without the use of a protective plug overlaying the via hole (Spec. 13:1-2), but this is not what is claimed. It is unclear what “remaining exposed” encompasses when Appellant’s Specification discloses covering portions of the via hole. Because the claims do not particularly point out and distinctly claim the subject matter which Appellant regards as the invention, we enter a new ground of rejection under 35 U.S.C. §112, second paragraph, as to all the Appeal 2012-004124 Application 11/652,735 4 pending claims. Because the proper bounds of the claims are not ascertainable, we reverse the Examiner’s obviousness rejections. See In re Steele, 305 F.2d 859, 862 (CCPA 1962) (reversed because § 103 rejection was based on considerable speculation as to meaning of terms of claims and assumptions as to their scope). This reversal is a procedural reversal based on the indefiniteness of the claims, not on the merits of the rejections. CONCLUSION We do not sustain the Examiner’s rejections, but we enter a new ground of rejection under 35 U.S.C. § 112, second paragraph, as to all the pending claims 1-12 and 21-28. DECISION The Examiner’s decision is reversed and a new ground of rejection entered. TIME PERIOD FOR RESPONSE 37 C.F.R. § 41.50(b) provides “[a] new ground of rejection pursuant to this paragraph shall not be considered final for judicial review.” 37 C.F.R. § 41.50(b) also provides that: T]he A]ppellant, within two months from the date of the decesion, must exercise one of the following two options with respect to the new ground of rejection to avoid termination of the appeal as to the rejected claims: (1) Reopen prosecution. Submit an appropriate amendment of the claims so rejected or new evidence relating to the claims so rejected, or both, and have the matter reconsidered by the Examiner, in which event the proceeding will be remanded to the Examiner. . . . Appeal 2012-004124 Application 11/652,735 5 (2) Request rehearing. Request that the proceeding be reheard under § 41.52 by the Board upon the same record. . . . No time period for taking any subsequent action in connection with this appeal may be extended under 37 C.F.R. § 1.136(a). See 37 C.F.R. § 1.136(a)(1)(iv). REVERSED 37 C.F.R. § 41.50(b) llw Copy with citationCopy as parenthetical citation