Ex Parte Yeh et alDownload PDFPatent Trial and Appeal BoardDec 11, 201211285614 (P.T.A.B. Dec. 11, 2012) Copy Citation UNITED STATES PATENT AND TRADEMARK OFFICE UNITED STATES DEPARTMENT OF COMMERCE United States Patent and Trademark Office Address: COMMISSIONER FOR PATENTS P.O. Box 1450 Alexandria, Virginia 22313-1450 www.uspto.gov APPLICATION NO. FILING DATE FIRST NAMED INVENTOR ATTORNEY DOCKET NO. CONFIRMATION NO. 11/285,614 11/21/2005 Chih Chieh Yeh MXIC 1553-9 9468 46353 7590 12/12/2012 MACRONIX C/O HAYNES BEFFEL & WOLFELD LLP P. O. BOX 366 HALF MOON BAY, CA 94019 EXAMINER DUONG, KHANH B ART UNIT PAPER NUMBER 2822 MAIL DATE DELIVERY MODE 12/12/2012 PAPER Please find below and/or attached an Office communication concerning this application or proceeding. The time period for reply, if any, is set in the attached communication. PTOL-90A (Rev. 04/07) UNITED STATES PATENT AND TRADEMARK OFFICE ________________ BEFORE THE PATENT TRIAL AND APPEAL BOARD ________________ Ex parte CHIH CHIEH YEH, HAN CHAO LAI, WEN JER TSAI, TAO CHENG LU, and CHIH YUAN LU ________________ Appeal 2010-007920 Application 11/285,614 Technology Center 2800 ________________ Before ERIC B. CHEN, TREVOR M. JEFFERSON, and JOHN G. NEW, Administrative Patent Judges. NEW, Administrative Patent Judge. DECISION ON APPEAL Appeal 2010-007920 Application 11/285,614 2 SUMMARY Appellants file this appeal under 35 U.S.C. § 134(a) from the Examiner’s Final Rejection of claims 1-15 as unpatentable under 35 U.S.C. § 103(a). Specifically, claims 1-5, 9, and 11-15 stand rejected under 35 U.S.C. § 103(a) as being obvious over Knall et al. (US 6,704,235 B2, March 9, 2004) (“Knall”) and Vyvoda et al. (US 6,490,218 B1, December 3, 2002) (“Vyvoda”). Claim 6 stands rejected under 35 U.S.C. § 103(a) as being obvious over Knall, Vyvoda, and Van Brocklin et al. (US 6,534,841 B1, March 18, 2003) (“Van Brocklin”). The Examiner additionally rejected claims 7, 8, and 10 under 35 U.S.C. § 103(a) as being obvious over Knall, Vyvoda, and Madurawe (US 6,713,839 B2, March 30, 2004) (“Madurawe”). We have jurisdiction under 35 U.S.C. § 6(b). We affirm. STATEMENT OF THE CASE Appellants’ invention is directed to a method for manufacturing an electrically programmable non-volatile memory cell comprising forming a first electrode on a substrate, forming an inter-electrode layer of material on the first electrode having a property which is characterized by progressive change in response to stress, and forming a second electrode over the inter- electrode layer of material. The inter-electrode layer comprises a dielectric layer. Abstract. Appeal 2010-007920 Application 11/285,614 3 GROUPING OF CLAIMS Claims 2-14 depend from claim 1. Because Appellants argue that the Examiner erred for substantially the same reasons with respect to independent claims 1 and 15, as well as dependent claims 2-20, we select claim 1 as representative of the claims on appeal. Claim 1 recites: 1. A method for manufacturing a memory cell, where data is stored by setting a property of the memory cell above or below a set of two or more reference levels to store a multiple bit data value, comprising: forming a first electrode; forming an inter-electrode layer of material on the first electrode, the inter-electrode layer of material having an property characterized by progressive change in response to stress; and forming a second electrode over the inter-electrode layer of material on the first electrode, wherein said stress comprises voltage less than 5 volts across the first and second electrodes; and providing circuitry coupled to the memory cell to set said property above or below reference levels in said set of reference levels to store a multiple bit data value in the memory cell in response to multiple bit input data. App. Br.13. ISSUE Appellants argue that the Examiner erred in finding that claim 1 is unpatentable under 35 U.S.C. § 103(a) as being obvious over Knall and Vyvoda. App. Br. 9. Specifically, Appellants argue that the Examiner erred because the Examiner finds that the combination of Knall and Vyvoda discloses or suggests the limitation of claim 1 reciting “the inter-electrode Appeal 2010-007920 Application 11/285,614 4 layer of material having an [sic] property characterized by progressive change in response to stress.” App. Br. 9. We therefore address the issue of whether the Examiner erred in finding that the combination of Knall and Vyvoda discloses or suggests that limitation. ANALYSIS Appellants argue that the plain meaning of “progressive change,” as described in the Specification, is a “gradual, nearly linear change.” Reply Br. 5 (citing Specification, ¶¶ [0076], [0077]). According to Appellants, Knall teaches the rupture or breakage of a central antifuse layer located between two electrodes, and is explicit in teaching that the antifuse layer is either ruptured or is not. App. Br. 10; Reply Br. 5. Appellants contend that it is nonsensical to use such an anti-fuse capable of storing a single bit value (either a ruptured high conductivity state or a not-ruptured low conductivity state) to store a multiple-bit value (the number of pulses required to rupture the anti-fuse). App. Br. 11. Appellants further argue that Vyvoda also fails to teach circuitry that sets a property characterized by a progressive change. Reply Br. 6. According to Appellants, Vyvoda discloses three disparate threshold current values, resulting in much wider margins between data values as further breakdown of the inter-electrode layer’s resistance occurs, and that the Vyvoda memory cells therefore rely on “hard,” rather than “progressive” breakdown in memory cells. Reply Br. 6-7. The Examiner responds that Knall discloses the same antifuse material (i.e., silicon dioxide) for its inter-electrode layer of material as does the claimed invention. Ans. 7 (citing Knall, col. 4, ll. 4-9, col. 10, ll. 34-39). The Examiner also finds that Vyvoda teaches providing circuitry comprising two Appeal 2010-007920 Application 11/285,614 5 electrodes coupled by an antifuse (e.g. silicon oxide) memory cell (MCI ... MCN) “to set a property (electrical resistance) of the memory cell above or below a set of two or more reference levels (Tl to T3) to store a multiple bit data value (2 or more bits) in the memory cell in response to multiple bit input data (WSI ... WS3).” Ans. 7 (quoting Vyvoda, Figs. 4-6, cols. 2-4, ll. 35-54). Consequently, according to the Examiner, it would have been obvious to a person of ordinary skill in the contemporaneous art to modify the method of Knall with the teaching of Vyvoda because of the desirability to maximize data storage density of the anti-fuse memory array. Ans. 8. We are not persuaded by Appellants’ argument that the Examiner erred in finding that the limitation of claim 1 reciting “the inter-electrode layer of material having an [sic] property characterized by progressive change in response to stress” is disclosed or suggested by the combination of Knall and Vyvoda. We agree with Appellants that Knall teaches an inter- electrode layer of antifuse that is either ruptured or is not. Reply Br. 5 (citing Knall, col. 1, ll. 26-37) (“The anti-fuse layer is initially intact, but it can be ruptured or broken by applying a sufficient voltage across the memory cell”). However, Vyvoda also teaches an inter-electrode layer, one that is characterized by progressive change in response to stress. Figure 4 of Vyvoda discloses an inter-electrode layer (MC1-MCN). Ans. 7. Figure 7 of Vyvoda discloses a graph of an exemplary relationship between the write current Iw used to program a selected memory cell and the associated read current IR that is measured when a 2 volt read voltage RV is applied to the selected memory cell: the relationship depicted between IR and Iw is that of a gradual, nearly linear change. Ans. 7; see also Vyvoda, col. 3, ll. 46- 50. Moreover, Vyvoda explicitly teaches that “[t]he state of a memory cell is read by applying a voltage across the memory cell and then making a Appeal 2010-007920 Application 11/285,614 6 measurement of a parameter that varies in accordance with the resistance of the memory cell, such as a measurement of voltage, current or power.” Vyvoda, col. 4, ll. 10-14) (emphasis added). We find that these teachings of Vyvoda, as cited by the Examiner, in combination with the teachings of Knall, disclose or suggest the limitation of claim 1 reciting “the inter-electrode layer of material having an [sic] property characterized by progressive change in response to stress.” We therefore conclude that the Examiner did not err in concluding that the recited limitation is unpatentable under 35 U.S.C. § 103(a) as being obvious over the combination of Knall and Vyvoda. DECISION The Examiner’s decision to reject claims 1-20 is affirmed. No time period for taking any subsequent action in connection with this appeal may be extended under 37 C.F.R. § 1.136(a)(1). See 37 C.F.R. § 1.136(a)(1)(iv) (2011). AFFIRMED ELD Copy with citationCopy as parenthetical citation